ITRI and Tokuyama Jointly Promote Development of Next-Generation Semiconductors
Publish Date :2021/03/16
Strong demand in the 5G, IoT, and automotive electronics markets, along with
the thriving development of AI, is driving the trend of the miniaturization in
the semiconductor industry. ITRI and Tokuyama, Japan’s renowned semiconductor
chemical materials manufacturer, are to jointly develop quality detection
technology for semiconductor materials, thereby rapidly screening out impurities
and enhance production quality. It is hoped that the cooperation will create the
foundation for the semiconductor industry to produce products with even higher
quality and specifications, thus enabling new-generation smart applications.
Dr. Tzeng-Yow Lin, General Director of ITRI’s Center for Measurement
Standards, commented that ITRI and Tokuyama started collaboration in 2018. “It
is Taiwan’s advantages in semiconductor manufacturing and ITRI’s excellence in
semiconductor nano-related detection technology that attracts Tokuyama to work
with ITRI on optimizing material detection in the wafer manufacturing process,”
stated Dr. Lin. “The two parties hope to provide Taiwan’s semiconductor makers
with advanced quality control technology to lower the product defect rate in the
process of miniaturizing semiconductor components. Meanwhile, this cooperation
will expand the use of ITRI’s measurement technology in the international
semiconductor market,” he added.
Tokuyama Managing Executive Officer Director Fumiaki Iwasaki mentioned that
over a century since its establishment, Tokuyama has branched out into a wide
range of businesses, including chemical, special, cement, and medical products.
Presently, in response to the needs of the semiconductor industry, Tokuyama and
ITRI are embarking on long-term cooperation to launch joint R&D of quality
inspection technology for semiconductor materials. ITRI’s advanced semiconductor
nano-related detection technology in conjunction with Tokuyama’s semiconductor
chemical materials technology will pave the way for the development of
state-of-the-art measurement technology for the semiconductor industry. He
further expressed his hopes for the joint creation of a technology blueprint for
even more advanced production process miniaturization in the semiconductor
industry to satisfy actual customer needs and raise the international
competitiveness of Taiwan's semiconductor industry.
ITRI has been involved in the development of a wide range of measurement
technologies for over 30 years, and it has been commissioned by the Bureau of
Standards, Metrology and Inspection under the Ministry of Economic Affairs to
operate the National Measurement Laboratory. Besides focusing on the
traceability of measurements and standards, it is also dedicated to the R&D in
semiconductors, including the development of thin films, surface analysis, and
particle measurement technology. ITRI has a wealth of experience in cooperation
with industry, and its considerable R&D successes are satisfying the needs of
the semiconductor industry in precision testing.
In addition to utilizing the expertise of Tokuyama in semiconductor
materials, this cooperation will forge the development of even more advanced and
sensitive measurement equipment, helping to bolster inspection services and
reduce the risk of wafer contamination. This Taiwan-Japan cooperation will
assist manufacturers in launching next-generation miniaturized semiconductor
production processes.
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